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New Micromachined Mirrors Microsystems By Robert ConantMicromachined Mirrors provides a framework for the design of micromirrors, and derives equations showing the fundamental limits for micromirror performance.
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Tunable Infrared FilterA microscanner (or micro-scanning mirror) is a micro-opto-electromechanical system (MOEMS) in the category of micro-mirror actuators for dynamic light modulation.
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Design and demonstration of PECVD multilayer dielectric mirrors optimized for micromachined cavity angled sidewalls.
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... micromachined Fabry-Perot filter | Journal of Micro/NanolithographyTHE KLUWER INTERNATIONAL SERIES IN MICROSYSTEMS Consulting Editor: Stephen Senturia MassachuseUs Institute of Technology Volumes published in.
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Micromachined crystal planes. be potentially used as optical mirrors for deflecting light. matu re technology for fabrication of advanced microsystems is.
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Low-Power Micromachined Microsystems Khalil Najafi Center for Integrated MicroSystems University of Michigan Ann Arbor, Michigan 48109-2122, USA.Compared with conventional silicon micromachined mirrors that.The proposed CCR consisted of two mutually orthogonal bulk-micromachined mirror assembled.
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This paper describes a 2D raster scanning system incorporating two surface-micromachined mirrors fabricated on separate chips: a fast mirror for horizontal.Microelectromechanical systems (MEMS, also written as micro-electro-mechanical, MicroElectroMechanical or microelectronic and microelectromechanical systems and the.Bulk micromachined quasistatic torsional micromirror Kiessling, Torsten One dimensional torsional micro mirrors for laser steering applications have been developed.